Design, Simulation, Fabrication and Performance Analysis of a Piezoresistive Micro Accelerometer

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Design, Simulation, Fabrication and Performance Analysis of a Piezoresistive Micro Accelerometer

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Title: Design, Simulation, Fabrication and Performance Analysis of a Piezoresistive Micro Accelerometer
Author: Trần Đức, Tân
URI: http://data.uet.vnu.edu.vn:8080/xmlui/handle/123456789/621
Date: 2010

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